Substrates for III-V nitride Film Deposition
Crystal |
Structure |
M.P. |
Density |
Lattice Mis-match to GaN |
Thermal Expansion |
Growth Tech. .& Max size |
Standard substrate size (mm) |
oC |
g/cm3 |
(10-6/k) |
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SiC (6H as example) |
Hexagonal |
~2700 |
3.21 |
3.5 % atori. |
10.3 |
CVD |
Ø2" x 0.3,Ø3"x0.3 |
a=3.073 Å |
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|
20x20x0.3,15x15x0.3 |
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c=15.117 Å |
|
Ø3“ |
10x10x0.3,5x5x0.3 |
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subl. |
|
1 side epi polished |
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Al2O3 |
Hexagonal |
2030 |
3.97 |
14% atori. |
7.5 |
CZ |
Ø50 x 0.33 |
a=4.758 Å |
|
Ø25 x 0.50 |
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c=12.99 Å |
Ø2” |
10x10x0.5 |
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|
1 or 2 sides epi polished |
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LiAlO2 |
Tetragonal |
1900 ~ |
2.62 |
1.4 % atori. |
/ |
CZ |
10x10x0.5 |
a=5.17 Å |
Ø20 mm |
1 or 2 sides epi polished |
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c=6.26 Å |
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|
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LiGaO2 |
Orthor. |
1600 |
4.18 |
0.2 % atori. |
/ |
CZ |
10x10x0.5 |
a=5.406 Å |
Ø20 mm |
1 or 2 sides epi polished |
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b=5.012Å |
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|
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c=6.379 Å |
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|
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MgO |
Cubic |
2852 |
3.58 |
3% atori. |
12.8 |
Flux |
2”x2”x 0.5 mm,Ø2” x 0.5 mm |
a=4.216 Å |
|
1”x1”x 0.5 mm,Ø1” x 0.5 mm |
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|
Ø2" |
10 x10x0.5 mm |
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|
|
1 or 2 sides epi polished |
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MgAl2O4 |
Cubic |
2130 |
3.6 |
9% atori. |
7.45 |
CZ |
Ø2" x 0.5 |
a=8.083 Å |
Ø2“ |
10x10x0.5 |
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|
|
1 or 2 sides epi polished |
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ZnO |
Hexag. |
1975 |
5.605 |
2.2 % atori. |
2.9 |
Hydro-thermal |
20x20x0.5 |
a=3.325 Å |
20mm |
1 or 2 sides epi polished |
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c=5.213 Å |
|
|
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GaN |
Hexagonal |
|
6.15 |
|
5.59 |
|
10x10x0.475mm |
|
|
5x5x0.475mm |